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Structure and electrical properties of AlN films prepared on PZT films by the DC reactive magnetron sputtering

✍ Scribed by Meng, Xiangqin; Yang, Chengtao; Yang, Jiancang

Book ID: 121564539
Publisher: The Korean Institute of Metals and Materials
Year: 2014
Tongue: English
Weight: 418 KB
Volume: 10
Category: Article
ISSN: 1738-8090
DOI: 10.1007/s13391-013-3091-5

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