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Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering

โœ Scribed by Arshad Mahmood; Nikifor Rakov; Mufei Xiao

Book ID
117357337
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
324 KB
Volume
57
Category
Article
ISSN
0167-577X

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