Surface metallic state of aluminum-nitride (AlN) thin films prepared by direct current (DC)-reactive magnetron sputtering: optical spectroscopic analysis with incoherent light

✍ Scribed by Nikifor Rakov; Arshad Mahmood; Mufei Xiao

• Book ID: 113894870
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 371 KB
• Volume: 50
• Category: Article
• ISSN: 1359-6462
• DOI: 10.1016/j.scriptamat.2003.11.034