Pseudo-analytical modelling of stress dependent silicon oxidation
โ Scribed by D. Collard; B. Baccus; V. Senez
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 207 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0167-9317
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