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The temperature dependence of stresses in aluminum films on oxidized silicon substrates

✍ Scribed by A.K. Sinha; T.T. Sheng

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 688 KB
Volume: 48
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(78)90337-1

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