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Proton beam micromachining on strippable aqueous base developable negative resist

✍ Scribed by I. Rajta; E. Baradács; M. Chatzichristidi; E.S. Valamontes; I. Uzonyi; I. Raptis


Book ID
103859016
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
215 KB
Volume
231
Category
Article
ISSN
0168-583X

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