✦ LIBER ✦
A study of catalytically transformed negative X-ray resists, based on aqueous base developable resin, an acid generator and a crosslinker
✍ Scribed by A. Bruns; H. Luethje; F.A. Vollenbroek; E.J. Spiertz
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 257 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
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