✦ LIBER ✦

Prospects of ion projection techniques for maskless implantation at high ion energies

✍ Scribed by Jan Meijer; Andreas Stephan

Book ID: 114165278
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 223 KB
Volume: 188
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)01002-3

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