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High-energy ion implantation for electrical isolation of microelectronic devices

✍ Scribed by M.C. Ridgway; S.L. Ellingboe; R.G. Elliman; J.S. Williams


Book ID
113284763
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
734 KB
Volume
89
Category
Article
ISSN
0168-583X

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