✦ LIBER ✦

MeV In-ion implantation for electrical isolation of p+-InP

✍ Scribed by M.C. Ridgway; R.G. Elliman; N. Hauser

Book ID: 113283503
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 215 KB
Volume: 80-81
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)90693-z

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-energy ion implantation for electri

High-energy ion implantation for electrical isolation of InP-based materials and devices

✍ M.C. Ridgway; R.G. Elliman; M.E. Faith; P.C. Kemeny; M. Davies 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 480 KB

High-energy ion implantation for electri

High-energy ion implantation for electrical isolation of microelectronic devices

✍ M.C. Ridgway; S.L. Ellingboe; R.G. Elliman; J.S. Williams 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 734 KB

Highly stripped ion sources for MeV ion

Highly stripped ion sources for MeV ion implantation

✍ Batalin, V. A.; Bugaev, A. S.; Gushenets, V. I.; Hershcovitch, A.; Johnson, B. M 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 709 KB

Formation of buried high-resistivity lay

Formation of buried high-resistivity layers in InP crystals by MeV nitrogen ion implantation

✍ Fulin Xiong; T.A. Tombrello; T.R. Chen; H. Wang; Y.H. Zhuang; A. Yariv 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 583 KB

Results of ion implantation into silicon

Results of ion implantation into silicon in the 100 MeV range. II. Electrical properties

✍ Fahkner, W. R. ;Heldemann, K. ;Schöttle, P. 📂 Article 📅 1982 🏛 John Wiley and Sons 🌐 English ⚖ 270 KB

Electrical isolation of n-type InP layer

Electrical isolation of n-type InP layers by helium implantation at variable substrate temperatures

✍ P. Too; S. Ahmed; R. Gwilliam; B.J. Sealy 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 182 KB