Electrical isolation of n-type InP layers by helium implantation at variable substrate temperatures

✍ Scribed by P. Too; S. Ahmed; R. Gwilliam; B.J. Sealy

• Book ID: 114165363
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 182 KB
• Volume: 188
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)01091-6