Highly stripped ion sources for MeV ion implantation

✍ Scribed by Batalin, V. A.; Bugaev, A. S.; Gushenets, V. I.; Hershcovitch, A.; Johnson, B. M.; Kolomiets, A. A.; Kuibeda, R. P.; Kondratiev, B. K.; Kulevoy, T. V.; Litovko, I. V.; Oks, E. M.; Pershin, V. I.; Poole, H. J.; Petrenko, S. V.; Seleznev, D. N.; Svarovski, A. Ya.; Turchin, V. I.; Yushkov, G. Yu.

• Book ID: 119992573
• Publisher: American Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 709 KB
• Volume: 75
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1702116