Ion sources for energy extremes of ion implantation (invited)

✍ Scribed by Hershcovitch, A.; Johnson, B. M.; Batalin, V. A.; Kropachev, G. N.; Kuibeda, R. P.; Kulevoy, T. V.; Kolomiets, A. A.; Pershin, V. I.; Petrenko, S. V.; Rudskoy, I.; Seleznev, D. N.; Bugaev, A. S.; Gushenets, V. I.; Litovko, I. V.; Oks, E. M.; Yushkov, G. Yu.; Masunov, E. S.; Polozov, S. M.; Poole, H. J; Storozhenko, P. A.; Svarovski, A. Ya.

• Book ID: 119992583
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 974 KB
• Volume: 79
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2801648