✦ LIBER ✦
High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes
✍ Scribed by Meijer, Jan; Burchard, Bernd; Ivanova, Katja; Volland, Burkhard E.; Rangelow, Ivo W.; Rüb, Michael; Deboy, Gerald
- Book ID
- 126916272
- Publisher
- AVS (American Vacuum Society)
- Year
- 2004
- Tongue
- English
- Weight
- 562 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0734-211X
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