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Properties of SiO2 films formed by oxygen implantation into silicon

✍ Scribed by K.I. Kirov; E.D. Atanasova; S.P. Alexandrova; B.G. Amov; A.E. Djakov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The dielectric breakdown properties and

✍ J. Dylewski; M.C. Joshi 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 544 KB

XPS studies of SiO2 surface layers forme

✍ Schulze, D. ;Finster, J. ;Hensel, E. ;Skorupa, W. ;Kreissig, U. 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 203 KB

Oxygen distributions in synthesized SiO2

✍ PLF Hemment; E Maydell-Ondrusz; KG Stevens; JA Kilner; J Butcher 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 579 KB

Properties of SOI structures formed by h

✍ Lu Diantong; Lu Wuxing; Wang Zhonglie; Du Yongchang; Zheng Huaide; Mo Dang; Lian 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 264 KB

Recoil implantation of oxygen from SiO2

✍ B. Villepelet; F. Ferrieu; A. Grouillet; A. Golanski; J.P. Gailliard; E. Ligeon 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 265 KB

The formation of SiO2 films on silicon b

✍ U. Kreissig; E. Hensel; W. Skorupa; H. Johansen 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 398 KB