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Recoil implantation of oxygen from SiO2 thin films on silicon

✍ Scribed by B. Villepelet; F. Ferrieu; A. Grouillet; A. Golanski; J.P. Gailliard; E. Ligeon


Publisher
Elsevier Science
Year
1981
Weight
265 KB
Volume
182-183
Category
Article
ISSN
0029-554X

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