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Properties of inductively coupled rf Ar/H[sub 2] plasmas: Experiment and global model

✍ Scribed by Kimura, Takashi; Kasugai, Hiroki

Book ID: 121444539
Publisher: American Institute of Physics
Year: 2010
Tongue: English
Weight: 442 KB
Volume: 107
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3345084

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