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Determination of Ar metastable atom densities in Ar and Ar/H 2 inductively coupled low-temperature plasmas

✍ Scribed by Fox-Lyon, N; Knoll, A J; Franek, J; Demidov, V; Godyak, V; Koepke, M; Oehrlein, G S

Book ID: 121356966
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 518 KB
Volume: 46
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/46/48/485202

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