## Abstract A unified, macroscopic, oneβdimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf
β¦ LIBER β¦
Properties of contactless and contacted charging in MEMS capacitive switches
β Scribed by Koutsoureli, M.; Michalas, L.; Martins, P.; Papandreou, E.; Leuliet, A.; Bansropun, S.; Papaioannou, G.; Ziaei, A.
- Book ID
- 121407857
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 906 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0026-2714
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