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Dielectric Charging in Capacitive RF MEMS Switches: The Effect of Extended Durations of Electric Stress

✍ Scribed by N. Tavassolian; G. Papaioannou; J. Papapolymerou

Book ID
123621311
Publisher
IEEE
Year
2011
Tongue
English
Weight
297 KB
Volume
21
Category
Article
ISSN
1531-1309

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Modeling of dielectric charging in RF ME
Modeling of dielectric charging in RF MEMS capacitive switches
✍ Prasad S. Sumant; Andreas C. Cangellaris; Narayana R. Aluru πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 242 KB

## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf