✦ LIBER ✦
Effect of deposition conditions on charging processes in SiNx: Application to RF-MEMS capacitive switches
✍ Scribed by Richard Daigler; Eleni Papandreou; Matroni Koutsoureli; George Papaioannou; John Papapolymerou
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 391 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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