✦ LIBER ✦
Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions
✍ Scribed by U. Zaghloul; G. Papaioannou; F. Coccetti; P. Pons; R. Plana
- Book ID
- 108210829
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 542 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0026-2714
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