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Properties of atomic-vapor and atomic-layer deposited Sr, Ti, and Nb doped Ta2O5 Metal–Insulator–Metal capacitors

✍ Scribed by M. Lukosius; C. Baristiran Kaynak; S. Kubotsch; T. Blomberg; G. Ruhl; Ch. Wenger

Book ID: 113937447
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 665 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.10.199

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