✦ LIBER ✦
Atomic Layer Deposited High-κ Films and Their Role in Metal-Insulator-Metal Capacitors for Si RF/Analog Integrated Circuit Applications
✍ Scribed by C. Zhu; B.-J. Cho; M.-F. Li
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 613 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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