✦ LIBER ✦

Properties of amorphous silicon nitride films prepared at high deposition rate

✍ Scribed by Yoshiki Nishibayashi; Takeshi Imura; Yukio Osaka

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High rate deposition of silicon nitride

✍ Tsuyoshi Otani; Masahiro Hirata 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 298 KB

Properties of amorphous silicon films: D

✍ S.K. Bahl; S.M. Bhagat; R. Glosser 📂 Article 📅 1973 🏛 Elsevier Science 🌐 English ⚖ 334 KB

Device quality hydrogenated amorphous si

✍ Debabrata Das; S.N. Sharma; Ratnabali Banerjee 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 581 KB

Optical characterization of hydrogenated

✍ S. H. Lin; Y. C. Chan; D. P. Webb; Y. W. Lam 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 139 KB

High-Rate Deposition of Amorphous Silico

✍ B. G. Budagyan; A. A. Sherchenkov; A. E. Berdnikov; V. D. Chernomordik 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 152 KB

Silicon nitride films prepared by high e

✍ J. Zemek; F. Černý; M. Závětová; M. Vaněček; V. Železný 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 496 KB