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Device quality hydrogenated amorphous silicon films deposited at high growth rates

✍ Scribed by Debabrata Das; S.N. Sharma; Ratnabali Banerjee

Book ID: 117148139
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 581 KB
Volume: 211
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(96)00645-x

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