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Optical characterization of hydrogenated amorphous silicon thin films deposited at high rate

✍ Scribed by S. H. Lin; Y. C. Chan; D. P. Webb; Y. W. Lam


Book ID
107457945
Publisher
Springer US
Year
1999
Tongue
English
Weight
139 KB
Volume
28
Category
Article
ISSN
0361-5235

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