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Device grade hydrogenated polymorphous silicon deposited at high rates

✍ Scribed by Y.M. Soro; A. Abramov; M.E. Gueunier-Farret; E.V. Johnson; C. Longeaud; P. Roca i Cabarrocas; J.P. Kleider

Book ID: 116671002
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 146 KB
Volume: 354
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2007.10.047

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