✦ LIBER ✦
An approach to device grade amorphous and microcrystalline silicon thin films fabricated at higher deposition rates
✍ Scribed by Michio Kondo; Akihisa Matsuda
- Book ID
- 117756928
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 824 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1359-0286
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