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Properties of AlN Layers Grown on SiC Substrates in Wide Temperature Range by HVPE

✍ Scribed by O.Yu. Ledyaev; A.E. Cherenkov; A.E. Nikolaev; I.P. Nikitina; N.I. Kuznetsov; M.S. Dunaevski; A.N. Titkov; V.A. Dmitriev

Book ID: 104556505
Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 173 KB
Volume: 0
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200390091

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