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Properties and durability of thin a-C:H overcoats produced by plasma enhanced chemical vapor deposition

✍ Scribed by Mei-Ling Wu; Kent Howard; Kevin Grannen; Jing Gui; Gary C Rauch; Paul J Sides


Book ID
114085258
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
195 KB
Volume
377-378
Category
Article
ISSN
0040-6090

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