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Production of Highly Homogeneous Si(100) Surfaces by H 2 O Etching: Surface Morphology and the Role of Strain

โœ Scribed by Faggin, Marc F.; Green, Sara K.; Clark, Ian T.; Queeney, K. T.; Hines, Melissa A.


Book ID
124101449
Publisher
American Chemical Society
Year
2006
Tongue
English
Weight
296 KB
Volume
128
Category
Article
ISSN
0002-7863

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