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Production etch processing for GaAs

โœ Scribed by Roy Szweda

Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
1008 KB
Volume
13
Category
Article
ISSN
0961-1290

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โœฆ Synopsis

Production etch processing for CaAs

Roy Szweda

I

CaAs manufacturing is moving more towards "silicon like" processes, driven by the need to produce evercheaper devices. This issue we look at dry etching, one of the techniques that is underpinning today's modern compound semiconductor fabs and providing good business for several suppliers.

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