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Tegal etch systems for GaAs


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
39 KB
Volume
19
Category
Article
ISSN
0961-1290

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Production etch processing for GaAs
โœ Roy Szweda ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 1008 KB

## Production etch processing for CaAs Roy Szweda ## I CaAs manufacturing is moving more towards "silicon like" processes, driven by the need to produce evercheaper devices. This issue we look at dry etching, one of the techniques that is underpinning today's modern compound semiconductor fabs an