✦ LIBER ✦
Dry etching techniques for GaAs ultra-high vacuum chamber integrated processing
✍ Scribed by Duncan Marshall; Richard B. Jackman
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 595 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0167-9317
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