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Surface processes in digital etching of GaAs

✍ Scribed by T. Meguro; M. Ishii; K. Kodama; Y. Yamamoto; K. Gamo; Y. Aoyagi

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 301 KB
Volume: 225
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90142-c

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