✦ LIBER ✦
Surface reaction control in digital etching of GaAs by using a tunable UV laser system: reaction control mechanism in layer-by-layer etching
✍ Scribed by M. Ishii; T. Meguro; T. Sugano; K. Gamo; Y. Aoyagi
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 383 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0169-4332
No coin nor oath required. For personal study only.