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Processing and encapsulation of silver patterns by using reactive ion etch and ammonia anneal

✍ Scribed by Yuxiao Zeng; Linghui Chen; Y.L Zou; P.A Nguyen; J.D Hansen; T.L Alford

Book ID: 114192429
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 464 KB
Volume: 66
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(00)00264-9

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