✦ LIBER ✦
Reactive ion etching of thin chromium films using a two-layer resist system of polyimide and evaporated silver halide
✍ Scribed by B. Spangenberg; V. Orlinov; G. Danev; E. Spasova; J. Malinovski
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 620 KB
- Volume
- 138
- Category
- Article
- ISSN
- 0040-6090
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