✦ LIBER ✦
Recovery of multilayer-coated Zerodur and ULE optics for extreme-ultraviolet lithography by recoating, reactive-ion etching, and wet-chemical processes
✍ Scribed by Mirkarimi, Paul B. ;Baker, Sherry L. ;Montcalm, Claude ;Folta, James A.
- Book ID
- 115349122
- Publisher
- The Optical Society
- Year
- 2001
- Tongue
- English
- Weight
- 120 KB
- Volume
- 40
- Category
- Article
- ISSN
- 1559-128X
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