𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Preparation of ZnO thin films using undulator and ArF excimer laser

✍ Scribed by A. Yoshida; K. Maeda; S. Ikeda; A. Ganjoo


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
224 KB
Volume
80
Category
Article
ISSN
0368-2048

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


ArF-excimer-laser annealing of 3C–SiC fi
✍ T. Mizunami; N. Toyama πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 248 KB

We fabricated Schottky barrier diodes using 3C-SiC ΓΏlms deposited on Si(1 1 1) by lamp-assisted thermal chemical vapor deposition and annealed with an ArF excimer laser. Improvement in both the reverse current and the ideality factor was obtained with 1-3 pulses with energy densities of 1.4 -1:6 J=c