Influence of hydrogen on the structure and surface morphology of pulsed ArF excimer laser crystallized amorphous silicon thin films

✍ Scribed by E.L. Mathé; A. Naudon; M. Elliq; E. Fogarassy; S. de Unamuno

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 726 KB
• Volume: 54
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90077-b