Sb excimer-laser doping in ZnO films prepared by oxidation of sulfide on Si

✍ Scribed by K. Ohara; T. Seino; A. Nakamura; T. Aoki; H. Kominami; Y. Nakanishi; Y. Hatanaka

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 202 KB
• Volume: 244
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2004.10.092