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Properties of ZnO thin films grown on Si substrates in vacuum and oxygen ambient by pulsed laser deposition

โœ Scribed by Jie Zhao; Lizhong Hu; Weifeng Liu; Zhaoyang Wang

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
284 KB
Volume
253
Category
Article
ISSN
0169-4332

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ZnO thin films on Si(1 1 1) gr
ZnO thin films on Si(1 1 1) grown by pulsed laser deposition from metallic Zn target
โœ Jie Zhao; Lizhong Hu; Zhaoyang Wang; Jie Sun; Zhijun Wang ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 400 KB

ZnO thin films with highly c-axis orientation have been fabricated on p-type Si(1 1 1) substrates at 400 8C by pulsed laser deposition (PLD) from a metallic Zn target with oxygen pressures between 0.1 and 0.7 mbar. Experimental results indicate that the films deposited at 0.3 and 0.5 mbar have bette