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Enhanced hardness in B-doped ZnO thin films on fused quartz substrates by pulsed-laser deposition

✍ Scribed by Songqing Zhao; Yueliang Zhou; Yuzi Liu; Kun Zhao; Shufang Wang; Wenfeng Xiang; Zhen Liu; Peng Han; Ze Zhang; Zhenghao Chen; Huibin Lu; Kuijuan Jin; Bolin Cheng; Guozhen Yang

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
634 KB
Volume
253
Category
Article
ISSN
0169-4332

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## Abstract InAs co‐doped ZnO films were grown on sapphire substrates by pulsed laser deposition. The grown films have been characterized using X‐ray diffraction (XRD), Hall effect measurements, Atomic force microscope (AFM) and Field emission scanning electron microscope (FESEM) in order to invest