Preparation of thin ferrite films on silicon using RF sputtering

✍ Scribed by Koblischka, M. R. ;Kirsch, M. ;Brust, M. ;Koblischka-Veneva, A. ;Hartmann, U.

• Book ID: 105364569
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 883 KB
• Volume: 205
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200723608

✦ Synopsis

Abstract

Thin‐films of Ni__~x~__ Zn~1–x~ Fe~2~O~4~ [(Ni,Zn)‐ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We find that the ferrite can be sputtered directly onto the Si surfaces, but an additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The microstructure of the films is investigated employing transmission electron microscopy, electron backscatter diffraction and magnetic force microscopy. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)