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Preparation and properties of Ba-ferrite films by rf diode sputtering

✍ Scribed by Akimitsu Morisako; Mitsunori Matsumoto; Masahiko Naoe

Book ID
112076234
Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
808 KB
Volume
70
Category
Article
ISSN
8756-663X

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πŸ“œ SIMILAR VOLUMES

Preparation of thin ferrite films on sil
Preparation of thin ferrite films on silicon using RF sputtering
✍ Koblischka, M. R. ;Kirsch, M. ;Brust, M. ;Koblischka-Veneva, A. ;Hartmann, U. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 883 KB

## Abstract Thin‐films of Ni__~x~__ Zn~1–__x__~ Fe~2~O~4~ [(Ni,Zn)‐ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We find that the ferrite can be sputtered directly onto the Si surfaces, but