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Preparation of sacrificial layer for MEMS devices by lift-off technology

✍ Scribed by Yang, Jie; Shi, Yu; Zhong, Hui; Jiao, Xiangquan; Zhang, Rui; Du, Bo

Book ID: 121483262
Publisher: Springer-Verlag
Year: 2013
Tongue: English
Weight: 380 KB
Volume: 20
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-013-1946-1

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