SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Preparation of PZT films derived by hybrid processing for MEMS application

SPIE Proceedings [SPIE Microelectronics,

✍ Yamaoka, Kanji; Wada, Masahiro; Kagami, Yoshiharu; Yoshida, Junichi; Ogata, Naoy 📂 Article 📅 2005 🏛 SPIE ⚖ 566 KB

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✍ du Plessis, Monuko; Conradie, Corrie; Chiao, Jung-Chih; Dzurak, Andrew S.; Jagad 📂 Article 📅 2005 🏛 SPIE ⚖ 369 KB

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✍ Clare, Bradley A.; Corbett, Kerry A.; Grant, Kenneth J.; Massie, Angus; Munch, J 📂 Article 📅 2004 🏛 SPIE ⚖ 382 KB

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✍ Miyata, Toshihiro; Suzuki, Yasuyuki; Minami, Tadatsugu; Abbott, Derek; Eshraghia 📂 Article 📅 2004 🏛 SPIE ⚖ 188 KB

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✍ Vrtacnik, D.; Resnik, D.; Aljancic, U.; Mozek, M.; Amon, S.; Chiao, Jung-Chih; D 📂 Article 📅 2005 🏛 SPIE ⚖ 501 KB

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✍ Hui, Wing C.; Chiao, Jung-Chih; Hariz, Alex J.; Jamieson, David N.; Parish, Giac 📂 Article 📅 2004 🏛 SPIE ⚖ 399 KB