SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - Silicon dry etching profile control by RIE at room temperature for MEMS applications

✍ Scribed by Vrtacnik, D.; Resnik, D.; Aljancic, U.; Mozek, M.; Amon, S.; Chiao, Jung-Chih; Dzurak, Andrew S.; Jagadish, Chennupati; Thiel, David V.

• Book ID: 120488609
• Publisher: SPIE
• Year: 2005
• Weight: 501 KB
• Volume: 6037
• Category: Article
• DOI: 10.1117/12.638701